自製雷射直寫機直寫還原氧化石墨稀之研究

Abstract

為滿足市場的趨勢，新世代的電子商品需要快速的生產與製造。而近十年來，因商品設計完成後可以快速打樣、修改產品之缺點，3D印表機成為快速生產模式的新寵兒。也因為3D印表機快速的發展，使得3D印表機製造成本下降，成為一般民眾可以購買的商品，不只是工廠的工具機。以此概念，本實驗設計低成本又可達到奈米等級之半導體電路製造機。 以3D印表機為基礎，利用Arduino開發軟體來做為控制器，以及精密螺桿、線性滑軌、兩相步進馬達，來製作雷射直寫機，載台最小移動距離可達50奈米。初步測試此雷射直寫機，我們將雷射光聚焦於材料的表面，以定點照射方式還原氧化石墨稀成為導電的石墨烯，而雷射線徑最小可達到12微米。用雷射照射樣品後，量測還原氧化石墨烯之電性。 我們將還原氧化石墨烯，以三種不同控制變因實驗方式，分別改變還原氧化石墨稀塗佈的厚度、雷射照射時間及雷射光點聚焦能量，來探討還原氧化石墨烯最適合的單點直寫之厚度、時間及能量等參數。 實驗後發現使用之參數在雷射功率5 mW、雷射波長523 nm雷射，以10倍物鏡聚焦、定點照射時間2分鐘、還原氧化石墨烯厚度約為3.0 nm時為最佳化的參數。以此設計的機台做延伸，也可發展雷射燒孔、雷射切割、雷射焊接等高精密加工機器。

Within decades, three dimensional (3D) printer has become a very popular machine for rapid production since it quickly make samples and help to correct the product shortcomings in the designing stage. In addition, the cost of 3D printer is very low so using 3D printer for machine design is not only easy and affordable for the general public. Following this concept, we try to develop a low cost and micrometer scale writer to make electronic circuits. Based on the 3D printer and Arduino as a controller, we employ the precision screw, linear slider and step motor to build up a laser writing machine. The shortest distance (single step) of the moving stage can reach ~50 nm. We demonstrate the reduction of graphene oxide by using the home-made laser writer. It is checked that the diameter of the laser spot is about 12 micrometers. After laser irradiation, we check the resistance of the reduction of graphene oxides. We vary three conditions of laser writing, including the coating thickness of graphene oxides, the time of laser exposure, and the power of the laser spot. Then, we discuss the change of resistance as a function of the three conditions. Our results show that the best condition for reduction is to use the laser with a power of 5 mW, a wavelength 523 nm integrated with the objective lens of 10X to irradiate the graphene oxide film of ~3 nm in thickness for ~2 minutes.