| Title: | 鋁導線清洗製程之改善 Improved Cleaning Process of Al Metal Line |
| Authors: | 賴振益 吳耀銓 Lai,Jen-I Wu,Yew-Chung Sermon 工學院半導體材料與製程設備學程 |
| Keywords: | 旋轉濕式清洗機台;槽式清洗機台;電化學反應;天線效應;尖端放電;SWC;DSP;Boom swing;Electrochemistry issue;Corona discharge;Antenna effect;plasma charging |
| Issue Date: | 2016 |
| URI: | http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070061307 http://hdl.handle.net/11536/142595 |
| Appears in Collections: | Thesis |
- 高密度電漿天線效應之研究 / 彭衍琦;Perng, Yean-Chyi;鄭晃忠, 戴寶通;Huang-Chung Cheng, Bau-Tong Dai
- 天線效應於0.13微米快閃記憶體所造成的損害及如何避免和良率提升之研究 / 廖學鉦;張國明;Dr. Kow-Ming Chang
- AlGaN/GaN MOS-HEMTs with Corona-Discharge Plasma Treatment / Yuan, Shuo-Huang;Chang, Feng-Yeh;Wuu, Dong-Sing;Horng, Ray-Hua
- 電漿製程天線效應對超薄閘氧化層電晶體特性影響之研究 / 林鴻志;HORNG-CHIHLIN
- 高密度電漿蝕刻應用於深次微米元件結構之研究 / 林文迪;Lin, Wendy;鄭晃忠, 戴寶通;Huang-Chung Cheng, Bau-Tong Dai
- An experimental study on the performance of a single discharge wire-plate electrostatic precipitator with back corona / Chang, CL;Bai, HL
- 電漿製程產生的天線效應對以超薄氧化層製作的深次微米元件可靠度之影響 / 簡昭欣;Chien, Chao-Hsin;張俊彥;Chang Chun-Yen
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