Investigation on Effects of Composition on Transparent Aluminum Zinc Tin Oxide Thin-Film Transistors

Title:	Investigation on Effects of Composition on Transparent Aluminum Zinc Tin Oxide Thin-Film Transistors
Authors:	Fuh, Chur-Shyang Teng, Li-Feng Fan, Yang-Shun Chang, Chih-Hsiang Liu, Po-Tsun 電子工程學系及電子研究所光電工程學系顯示科技研究所 Department of Electronics Engineering and Institute of Electronics Department of Photonics Institute of Display
Keywords:	AZTO;transparent metal oxide semiconductor
Issue Date:	1-Jan-2012
Abstract:	We investigated on electrical performance of amorphous Al-Zn-Sn-O thin film transistor (AZTO TFT). The mobility enhanced while the concentration of Sn increased. The improved stability can be attributed to the increase of Sn concentration and enhancement of bonding energy of metal ion with the increase of O-2 gas flow rate.
URI:	http://hdl.handle.net/11536/146487
ISSN:	1883-2490
Journal:	IDW/AD '12: PROCEEDINGS OF THE INTERNATIONAL DISPLAY WORKSHOPS, PT 2
Volume:	19
Begin Page:	875
End Page:	877
Appears in Collections:	Conferences Paper