The Effect of Oxygen Flow Rates on the Electrical Resistivity of MgO Thin Films in AC-PDPs

Title:	The Effect of Oxygen Flow Rates on the Electrical Resistivity of MgO Thin Films in AC-PDPs
Authors:	Chou, Hong-Chieh Kim, Sung-O Chen, Kuang-Lang Chen, Samuel Lee, Chien-Pang Hsu, Chien-Hsing Chou, Kuo-Ching Huang, Chih-Ming 光電工程學系 Department of Photonics
Issue Date:	2006
Abstract:	Magnesium oxide thin films were deposited with different thickness and oxygen flow rates for investigation the effects of the electrical resistivity of MgO thin films in AC-PDPs. The surface roughness was characterized by AFM. It reveals that higher oxygen flow rate generates higher electrical resistivity of MgO thin films.
URI:	http://hdl.handle.net/11536/17368
ISSN:	1738-7558
Journal:	IMID/IDMC 2006: THE 6TH INTERNATIONAL MEETING ON INFORMATION DISPLAY/THE 5TH INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE, DIGEST OF TECHNICAL PAPERS
Begin Page:	383
End Page:	386
Appears in Collections:	Conferences Paper