| Title: | AlSixOy as a high transmittance embedded material for AttPSM and the correlation between the chemical compositions and optical properties of AlSixOy in 193 nm lithography |
| Authors: | Lin, CM 應用化學系 Department of Applied Chemistry |
| Issue Date: | 2000 |
| URI: | http://hdl.handle.net/11536/19309 |
| ISBN: | 4-89114-004-6 |
| Journal: | MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS |
| Begin Page: | 12 |
| End Page: | 13 |
| Appears in Collections: | Conferences Paper |
- 193奈米微影用正規與高透射率嵌附層材料之探討及減光型相移圖罩應用之模擬 / 林政旻;Cheng-ming Lin;龍文安;Dr. Loong Wen-an
- AlSixOy as a high-transmittance embedded material of ternary attenuated phase-shifting mask and correlation between chemical composition and optical properties of AlSixOy in 193 nm lithography / Lin, CM;Loong, WA
- TiSixNy and TiSixOyNz as embedded materials for attenuated phase-shifting mask in 193 nm / Lin, CM;Loong, WA
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