Title: OPTICAL-PROPERTIES OF ZRTIO4 FILMS GROWN BY RADIOFREQUENCY MAGNETRON SPUTTERING
Authors: CHANG, DA
LIN, P
TSENG, TY
材料科學與工程學系
Department of Materials Science and Engineering
Issue Date: 1-May-1995
URI: http://dx.doi.org/10.1063/1.359472
http://hdl.handle.net/11536/1932
ISSN: 0021-8979
DOI: 10.1063/1.359472
Journal: JOURNAL OF APPLIED PHYSICS
Volume: 77
Issue: 9
Begin Page: 4445
End Page: 4451
Appears in Collections:Articles