Title: | OPTICAL-PROPERTIES OF ZRTIO4 FILMS GROWN BY RADIOFREQUENCY MAGNETRON SPUTTERING |
Authors: | CHANG, DA LIN, P TSENG, TY 材料科學與工程學系 Department of Materials Science and Engineering |
Issue Date: | 1-May-1995 |
URI: | http://dx.doi.org/10.1063/1.359472 http://hdl.handle.net/11536/1932 |
ISSN: | 0021-8979 |
DOI: | 10.1063/1.359472 |
Journal: | JOURNAL OF APPLIED PHYSICS |
Volume: | 77 |
Issue: | 9 |
Begin Page: | 4445 |
End Page: | 4451 |
Appears in Collections: | Articles |