Modified process control chart in IC fabrication using clustering analysis

Title:	Modified process control chart in IC fabrication using clustering analysis
Authors:	Tong, LI Lee, WI 工業工程與管理學系 Department of Industrial Engineering and Management
Issue Date:	1997
URI:	http://hdl.handle.net/11536/19631
ISBN:	0-7803-3574-0
Journal:	INNOVATION IN TECHNOLOGY MANAGEMENT - THE KEY TO GLOBAL LEADERSHIP: THE KEY TO GLOBAL LEADERSHIP
Begin Page:	704
End Page:	704
Appears in Collections:	Conferences Paper