THE ELLIPSOMETRIC MEASUREMENTS ON SIO2 BY INTENSITY RATIO TECHNIQUE

Title:	THE ELLIPSOMETRIC MEASUREMENTS ON SIO2 BY INTENSITY RATIO TECHNIQUE
Authors:	CHAO, YF WEI, CS LEE, WC LIN, SC 交大名義發表 National Chiao Tung University
Keywords:	ELLIPSOMETRY;THIN FILM
Issue Date:	1994
URI:	http://hdl.handle.net/11536/20125 http://dx.doi.org/10.1117/12.186666
ISBN:	0-8194-1589-8
DOI:	10.1117/12.186666
Journal:	POLARIZATION ANALYSIS AND MEASUREMENT II
Volume:	2265
Begin Page:	171
End Page:	180
Appears in Collections:	Conferences Paper

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