Determination of ultrathin oxide thickness by subthreshold swing

Title:	Determination of ultrathin oxide thickness by subthreshold swing
Authors:	Cha, TS 電子物理學系 Department of Electrophysics
Keywords:	oxide;subthreshold swing;N2O;thickness
Issue Date:	1-May-2002
Abstract:	Thickness determination of ultrathin oxide by the subthreshold swing has bee developed. From the experimental result, oxide thickness in the range of 3.0-5.3 nm exhibits a linear dependence on the subthreshold swing. We found that this dependence is also valid for oxide grown in N2O or O-2.
URI:	http://dx.doi.org/10.1143/JJAP.41.2904 http://hdl.handle.net/11536/28834
ISSN:	0021-4922
DOI:	10.1143/JJAP.41.2904
Journal:	JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume:	41
Issue:	5A
Begin Page:	2904
End Page:	2905
Appears in Collections:	Articles

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