DEPOSITION OF TANTALUM NITRIDE THIN-FILMS FROM ETHYLIMIDOTANTALUM COMPLEX

doi:10.1007/BF00724610

Title:	DEPOSITION OF TANTALUM NITRIDE THIN-FILMS FROM ETHYLIMIDOTANTALUM COMPLEX
Authors:	CHIU, HT CHANG, WP 交大名義發表應用化學系 National Chiao Tung University Department of Applied Chemistry
Issue Date:	15-Jan-1992
URI:	http://dx.doi.org/10.1007/BF00724610 http://hdl.handle.net/11536/3553
ISSN:	0261-8028
DOI:	10.1007/BF00724610
Journal:	JOURNAL OF MATERIALS SCIENCE LETTERS
Volume:	11
Issue:	2
Begin Page:	96
End Page:	98
Appears in Collections:	Articles