ETHYLIMIDOTANTALUM COMPLEX AS PRECURSOR TO TANTALUM NITRIDE THIN-FILMS

Title:	ETHYLIMIDOTANTALUM COMPLEX AS PRECURSOR TO TANTALUM NITRIDE THIN-FILMS
Authors:	CHIU, HT CHANG, WP 應用化學系 Department of Applied Chemistry
Issue Date:	25-Aug-1991
URI:	http://hdl.handle.net/11536/3709
ISSN:	0065-7727
Journal:	ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
Volume:	202
Issue:
Begin Page:	74
End Page:	INOR
Appears in Collections:	Articles