液晶顯示器陣列/彩色濾光片製程大面積光阻塗佈狹縫式噴嘴國產化之測試研究

Abstract

有鑒於國內液晶顯示器陣列、彩色濾光片製程大面積光阻塗佈噴嘴之生產製造技術、供應市場皆為日本廠商所獨佔壟斷，使得光阻塗佈機之關鍵零組件光阻塗佈噴嘴(Slit Nozzle)價格居高不下，因此決定本論文之研究方向以光阻塗佈噴嘴(Slit Nozzle)國產化方式進行研究，此研究題目與國內廠商合作進行光阻塗佈噴嘴(Slit Nozzle)國產化製造開發，一方面可扶植國內精密加工機械產業之技術開發，另方面亦可使此關鍵零組件降低成本，由國內廠商自行設計、開發、製造、量產，而不受限於日本原廠製造技術、供應市場之獨佔與壟斷。本研究使用量產上之設備機台進行測試實驗(如：玻璃基板清洗機，光阻塗佈機，膜厚量測機，微觀檢測機，Mura檢測機…等)，來進行國產化與日本原廠之塗佈噴嘴之驗證比較，以期望得到與日本原廠最接近之研究結果，進而縮短量產與交期時間，並提升本公司之競爭力。此外本研究利用理論及有限元素法的分析求得有效的調整方式，能夠使光阻塗佈噴嘴之塗佈厚度有效收斂至規格內。其調整方式與實驗結果之比對與討論也在本研究論文中呈現。

Because Japanese suppliers have monopolized both the manufacturing technologies and supply chain for LCD array and color filter slit nozzles, the market prices of key coater machine components are consistently high. Therefore, the motivation of this thesis is to build partnerships with domestic vendors to research, develop, and increase the production capacity of key coater machine components. We estimate that this plan, once successfully implemented, will result in financial savings of NTD$300 million. To obtain the most approximate comparison results between domestic and Japanese imported slit nozzles, this study utilizes mass production equipment for testing and verification (i.e., Cleaner, Coater Machine, KLA, Small Macro Inspection, Mura Inspection… ). It is helpful for reducing production lead time and increase competition in the market. This study also presents an effective method to adjust thickness by using finite-element analysis and fluid mechanics theory. Experimental results are also presented and discussed.