LOW-PRESSURE CHEMICAL VAPOR-DEPOSITION OF TIN AND ZRN THIN-FILMS FROM TI(NET2)4 AND ZR(NET2)4

Title:	LOW-PRESSURE CHEMICAL VAPOR-DEPOSITION OF TIN AND ZRN THIN-FILMS FROM TI(NET2)4 AND ZR(NET2)4
Authors:	CHIU, HT HUANG, CC 應用化學系 Department of Applied Chemistry
Issue Date:	26-Aug-1990
URI:	http://hdl.handle.net/11536/4035
ISSN:	0065-7727
Journal:	ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
Volume:	200
Issue:
Begin Page:	253
End Page:	INOR
Appears in Collections:	Articles