CONTACT RESISTIVITIES OF AL AND TI ON SI MEASURED BY A SELF-ALIGNED VERTICAL KELVIN TEST RESISTOR STRUCTURE

Title:	CONTACT RESISTIVITIES OF AL AND TI ON SI MEASURED BY A SELF-ALIGNED VERTICAL KELVIN TEST RESISTOR STRUCTURE
Authors:	WEN, LY TAN, FL CHUNG, LL 交大名義發表電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering
Issue Date:	1-Nov-1989
URI:	http://hdl.handle.net/11536/4266
ISSN:	0038-1101
Journal:	SOLID-STATE ELECTRONICS
Volume:	32
Issue:	11
Begin Page:	997
End Page:	1001
Appears in Collections:	Articles