應用模擬方法提昇半導體機台生產力

Abstract

為了降低晶圓製造工廠生產成本與增加競爭優勢，必須找出有效地提昇生產機台生產力的方法，以滿足市場對晶圓產能與低價格的需求。本研究主要是將機台內部的加工槽與機械手臂切分成獨立的資源，透過電腦模擬這些資源的狀態，並預測機台在複雜之加工途程的行為。以找到最大生產產出的資源參數。 這個機台資源模擬模組是架構於有限產能負荷之假設上，依據在製品流程模組、可用資源限制模組以及資源預留模組來預估資源負荷狀況，並呈現出各個資源的關聯性與產出績效。應用模擬模組可以避免非瓶頸資源使用率尖峰期的發生而導致瓶頸資源發生閒置的情況。本研究藉由案例驗證說明，機台資源模擬模組可以明顯改善機台生產績效與減少實驗過程中的時間成本。

Semiconductor industry always requires more capacity and lower cost in past years. To fulfill this goal, semiconductors are searching a methodology to increase their equipment productivity for reducing the production cost and increasing their capacity. This research is trying to find out the best condition of equipments to achieve the maximum throughput performance by the equipment simulator, which is treating the process chambers and robots of semiconductor equipment as independent resources in its model and can predict the equipment behavior during the processing. The framework of this resource simulation model was constructed by process flow model、resource limitation model and resource reservation model to predict the loading of each resource and capacity of all resources are limited. This simulation model can provide the connection between resources and predictable productivity performance to reduce the possibility of bottleneck resource idle in real factory. In this case, the equipment productivity was increased obviously and no trial-and-error time required.