COBALT SILICIDE INTERCONNECTION FROM A SI/W/CO TRILAYER STRUCTURE

Title:	COBALT SILICIDE INTERCONNECTION FROM A SI/W/CO TRILAYER STRUCTURE
Authors:	LIN, MZ WU, CY 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
Issue Date:	1-Jan-1989
URI:	http://hdl.handle.net/11536/4459
ISSN:	0013-4651
Journal:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	136
Issue:	1
Begin Page:	258
End Page:	262
Appears in Collections:	Articles

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