MICROSTRUCTURE AND PROPERTIES OF MULTILAYER-DERIVED TUNGSTEN SILICIDE

doi:10.1007/BF02653362

Title:	MICROSTRUCTURE AND PROPERTIES OF MULTILAYER-DERIVED TUNGSTEN SILICIDE
Authors:	CHIOU, BS RAU, HL CHANG, PH DUH, JG 電控工程研究所 Institute of Electrical and Control Engineering
Issue Date:	1-Jul-1987
URI:	http://dx.doi.org/10.1007/BF02653362 http://hdl.handle.net/11536/4634
ISSN:	0361-5235
DOI:	10.1007/BF02653362
Journal:	JOURNAL OF ELECTRONIC MATERIALS
Volume:	16
Issue:	4
Begin Page:	251
End Page:	255
Appears in Collections:	Articles