SUPERIOR CHARACTERISTICS OF THERMAL OXIDE LAYERS GROWN ON AMORPHOUS-SILICON FILMS

doi:10.1063/1.97951

Title:	SUPERIOR CHARACTERISTICS OF THERMAL OXIDE LAYERS GROWN ON AMORPHOUS-SILICON FILMS
Authors:	WU, CY CHEN, CF 交大名義發表工學院 National Chiao Tung University College of Engineering
Issue Date:	27-Apr-1987
URI:	http://dx.doi.org/10.1063/1.97951 http://hdl.handle.net/11536/4646
ISSN:	0003-6951
DOI:	10.1063/1.97951
Journal:	APPLIED PHYSICS LETTERS
Volume:	50
Issue:	17
Begin Page:	1167
End Page:	1169
Appears in Collections:	Articles