CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPE STUDY OF THE GROWTH-KINETICS OF HEXAGONAL MOSI2 ON (001)SI

doi:10.1063/1.337982

Title:	CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPE STUDY OF THE GROWTH-KINETICS OF HEXAGONAL MOSI2 ON (001)SI
Authors:	CHENG, JY CHENG, HC CHEN, LJ 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
Issue Date:	15-Mar-1987
URI:	http://dx.doi.org/10.1063/1.337982 http://hdl.handle.net/11536/4658
ISSN:	0021-8979
DOI:	10.1063/1.337982
Journal:	JOURNAL OF APPLIED PHYSICS
Volume:	61
Issue:	6
Begin Page:	2218
End Page:	2223
Appears in Collections:	Articles