AN ENVIRONMENT-INSENSITIVE TRILAYER STRUCTURE FOR TITANIUM SILICIDE FORMATION

Title:	AN ENVIRONMENT-INSENSITIVE TRILAYER STRUCTURE FOR TITANIUM SILICIDE FORMATION
Authors:	LIN, MZ YU, YCS WU, CY 電控工程研究所 Institute of Electrical and Control Engineering
Issue Date:	1-Nov-1986
URI:	http://hdl.handle.net/11536/4713
ISSN:	0013-4651
Journal:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	133
Issue:	11
Begin Page:	2386
End Page:	2389
Appears in Collections:	Articles

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