| Title: | A VERTICAL KELVIN TEST STRUCTURE FOR MEASURING THE TRUE SPECIFIC CONTACT RESISTIVITY |
| Authors: | LEI, TF LEU, LY LEE, CL 交大名義發表 電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering |
| Issue Date: | 1-Apr-1986 |
| URI: | http://hdl.handle.net/11536/4754 |
| ISSN: | 0741-3106 |
| Journal: | IEEE ELECTRON DEVICE LETTERS |
| Volume: | 7 |
| Issue: | 4 |
| Begin Page: | 259 |
| End Page: | 261 |
| Appears in Collections: | Articles |
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- NUMERICAL-SIMULATION OF THE VERTICAL KELVIN TEST STRUCTURE FOR SPECIFIC CONTACT RESISTIVITY / LEU, LY;LEE, CL;LEI, TF;YANG, WL
- CONTACT RESISTIVITIES OF AL AND TI ON SI MEASURED BY A SELF-ALIGNED VERTICAL KELVIN TEST RESISTOR STRUCTURE / WEN, LY;TAN, FL;CHUNG, LL
- THE SPREADING RESISTANCE ERROR IN THE VERTICAL KELVIN TEST RESISTOR STRUCTURE FOR THE SPECIFIC CONTACT RESISTIVITY / LEE, CL;YANG, WL;LEI, TF
- SPECIFIC CONTACT RESISTIVITY MEASUREMENT BY A VERTICAL KELVIN TEST STRUCTURE / TAN, FL;LEU, LY;CHUNG, LL
- Evaluation of Ultra-low Specific Contact Resistance Extraction by Cross-Bridge Kelvin Resistor Structure and Transmission Line Method Structure / Tsui, Bing-Yue;Tseng, Hsuan-Tzu
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