SUPERIOR CHARACTERISTICS OF NITRIDIZED THERMAL OXIDE GROWN ON POLYCRYSTALLINE SILICON

doi:10.1063/1.97029

Title:	SUPERIOR CHARACTERISTICS OF NITRIDIZED THERMAL OXIDE GROWN ON POLYCRYSTALLINE SILICON
Authors:	CHEN, CF WU, CY 交大名義發表工學院 National Chiao Tung University College of Engineering
Issue Date:	13-Jan-1986
URI:	http://dx.doi.org/10.1063/1.97029 http://hdl.handle.net/11536/4771
ISSN:	0003-6951
DOI:	10.1063/1.97029
Journal:	APPLIED PHYSICS LETTERS
Volume:	48
Issue:	2
Begin Page:	165
End Page:	167
Appears in Collections:	Articles