STUDY OF ELECTRICAL CHARACTERISTICS ON THERMALLY NITRIDED SIO2 (NITROXIDE) FILMS

Title:	STUDY OF ELECTRICAL CHARACTERISTICS ON THERMALLY NITRIDED SIO2 (NITROXIDE) FILMS
Authors:	CHEN, CT TSENG, FC CHANG, CY LEE, MK 電控工程研究所 Institute of Electrical and Control Engineering
Issue Date:	1984
URI:	http://hdl.handle.net/11536/4869
ISSN:	0013-4651
Journal:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	131
Issue:	4
Begin Page:	875
End Page:	877
Appears in Collections:	Articles

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