TUNGSTEN SILICIDE PREPARED BY COEVAPORATION OF W AND SI SUBSTANCES

Title:	TUNGSTEN SILICIDE PREPARED BY COEVAPORATION OF W AND SI SUBSTANCES
Authors:	CHEN, MC JOHN, DY 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
Issue Date:	1984
URI:	http://hdl.handle.net/11536/4887
ISSN:	0013-4651
Journal:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	131
Issue:	3
Begin Page:	C87
End Page:	C87
Appears in Collections:	Articles