深蝕刻分布式布拉格反射鏡之微共振腔邊射型雷射之研究

Abstract

本論文中，我們以深蝕刻布拉格反射鏡取代傳統劈裂鏡面來當作雷射的背面反射鏡。首先，我們使用濕蝕刻製程製作出脊狀波導雷射。接著，我們使用聚焦離子束來取代傳統的電子束微影系統，藉此減少布拉格反射鏡的圖案在製程當中因多次圖形轉換而產生的圖樣失真，並從量測結果驗證此製程的可行性。在布拉格反射鏡的寬度設計上，我們不使用傳統布拉格條件的寬度，而是選用有最大誤差容忍度的寬度。我們製造了幾種不同共振腔長度的單邊劈裂布拉格反射鏡雷射元件，共振腔長度最短縮小至70㎛，此時的模距為1.85nm。接著我們將元件做變溫特性分析，大部分元件的特徵溫度約為80~100K，我們從各種不同共振腔長度的變溫頻譜分析中觀察到短共振腔元件的增益頻譜隨溫度的紅移速度有比一般的劈裂鏡面雷射還要緩慢的趨勢。

In this thesis, we use deep-etched Distributed Bragg reflector (DBR) to replace cleaved facet as the back side mirror. At first, we use wet etching method to fabrication ridge waveguide laser. Then, we use focus ion beam (FIB) to replace e-beam lithography, which method can reduce graphic distortion graphic distortion of multiple pattern transform, the experiment result verify the probability of this fabrication method. In the width design of DBR, it doesn't satisfy Bragg condition, we choice the width condition which have the best fabrication error tolerance. We fabrication several single-side DBR laser diode which have different cavity length, the shortest cavity length of those devices is 70㎛ with 1.85nm mode spacing. Next, we analysis the variable temperature characteristic of those devices, the characteristic temperature of most devices are 80-100K, we also observe that the gain peak red shift velocity by temperature variable of short cavity devices are faster than typical cleaved facet laser devices.