BELT TRANSPORT CVD PROCESSING

Title:	BELT TRANSPORT CVD PROCESSING
Authors:	LEE, MK LU, CY SHIH, CT 電控工程研究所 Institute of Electrical and Control Engineering
Issue Date:	1983
URI:	http://hdl.handle.net/11536/4943
ISSN:	0013-4651
Journal:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	130
Issue:	11
Begin Page:	2249
End Page:	2252
Appears in Collections:	Articles

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APA	LEE, M., LU, C., & SHIH, C. (1983). BELT TRANSPORT CVD PROCESSING. WOS:A1983RQ24800021.
Bibtex	@article{LEE1983BELT, title={BELT TRANSPORT CVD PROCESSING}, author={LEE, MK and LU, CY and SHIH, CT}, journal={WOS:A1983RQ24800021}, year={1983}, url={https://ir.lib.nycu.edu.tw/handle/11536/4943}, }