GROWTH-KINETICS OF SILICON THERMAL NITRIDATION

Title:	GROWTH-KINETICS OF SILICON THERMAL NITRIDATION
Authors:	WU, CY KING, CW LEE, MK CHEN, CT 電控工程研究所 Institute of Electrical and Control Engineering
Issue Date:	1982
URI:	http://hdl.handle.net/11536/4955
ISSN:	0013-4651
Journal:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	129
Issue:	7
Begin Page:	1559
End Page:	1563
Appears in Collections:	Articles

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APA	WU, C., KING, C., LEE, M., & CHEN, C. (1982). GROWTH-KINETICS OF SILICON THERMAL NITRIDATION. WOS:A1982NW36700032.
Bibtex	@article{WU1982GROWTH-KINETICS, title={GROWTH-KINETICS OF SILICON THERMAL NITRIDATION}, author={WU, CY and KING, CW and LEE, MK and CHEN, CT}, journal={WOS:A1982NW36700032}, year={1982}, url={https://ir.lib.nycu.edu.tw/handle/11536/4955}, }