CHARACTERIZATION OF MONOLITHIC POLYCRYSTALLINE-SILICON RESISTORS IN SUB-MICRON THICKNESS

Title:	CHARACTERIZATION OF MONOLITHIC POLYCRYSTALLINE-SILICON RESISTORS IN SUB-MICRON THICKNESS
Authors:	LU, NCC LU, CY LEE, MK SHIH, CC WANG, CS SHENG, TT REUTER, W 交大名義發表 National Chiao Tung University
Issue Date:	1982
URI:	http://hdl.handle.net/11536/4986
ISSN:	0013-4651
Journal:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	129
Issue:	8
Begin Page:	C331
End Page:	C331
Appears in Collections:	Articles