CF4 PLASMA-ETCHING ON LINBO3

doi:10.1063/1.90959

Title:	CF4 PLASMA-ETCHING ON LINBO3
Authors:	LEE, CL LU, CL 交大名義發表電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering
Issue Date:	1979
URI:	http://hdl.handle.net/11536/5088 http://dx.doi.org/10.1063/1.90959
ISSN:	0003-6951
DOI:	10.1063/1.90959
Journal:	APPLIED PHYSICS LETTERS
Volume:	35
Issue:	10
Begin Page:	756
End Page:	758
Appears in Collections:	Articles