PRE-OXIDATION GETTERING OF OXIDATION-INDUCED STACKING-FAULTS IN SILICON BY THE PHOSPHORUS DIFFUSION PROCESS

Title:	PRE-OXIDATION GETTERING OF OXIDATION-INDUCED STACKING-FAULTS IN SILICON BY THE PHOSPHORUS DIFFUSION PROCESS
Authors:	CHEN, JH CHEN, MC 電控工程研究所 Institute of Electrical and Control Engineering
Issue Date:	1979
URI:	http://hdl.handle.net/11536/5098
ISSN:	0020-7217
Journal:	INTERNATIONAL JOURNAL OF ELECTRONICS
Volume:	47
Issue:	6
Begin Page:	555
End Page:	560
Appears in Collections:	Articles