Title: | 矽之微細加工技術及應用 Silicon micromachining technique and applications |
Authors: | 翁炳國 謝正雄 光電工程學系 |
Issue Date: | 1986 |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#NT752124002 http://hdl.handle.net/11536/52812 |
Appears in Collections: | Thesis |
Title: | 矽之微細加工技術及應用 Silicon micromachining technique and applications |
Authors: | 翁炳國 謝正雄 光電工程學系 |
Issue Date: | 1986 |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#NT752124002 http://hdl.handle.net/11536/52812 |
Appears in Collections: | Thesis |