Title: | 用一嶄新的結構構建熱動式微致動器及微應變感測器 = A novel microstructure for constructing thermally driven microactuators and micro strain sensors |
Authors: | 潘吉祥 徐文祥 機械工程學系 |
Issue Date: | 1997 |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#NT866489109 http://hdl.handle.net/11536/63696 |
Appears in Collections: | Thesis |