高速磁浮渦輪分子真空幫浦之開發(III)

Title:	高速磁浮渦輪分子真空幫浦之開發(III) The Development of High-Speed Magnetic-Bearing Suspended Turbo Molecular Pump(III)
Authors:	李安謙 LEE AN-CHEN 交通大學機械工程系
Issue Date:	2004
Gov't Doc #:	NSC93-2212-E009-002
URI:	http://hdl.handle.net/11536/91227 https://www.grb.gov.tw/search/planDetail?id=984798&docId=183784
Appears in Collections:	Research Plans