半導體氮(磷)化物化學蒸鍍中的自由基及中間物之結構,動力學及能階(III)(中加國合計畫)

Title:	半導體氮(磷)化物化學蒸鍍中的自由基及中間物之結構,動力學及能階(III)(中加國合計畫) Chemical Vapor Deposition of Semiconductor Nitrides and Phosphides:Structure,Kinetics,and Energetics of Radical s and Intermediates (III)
Authors:	李遠鵬 LEE YUAN-PERN 交通大學應用化學系
Issue Date:	2004
Gov't Doc #:	NSC93-2113-M009-018
URI:	http://hdl.handle.net/11536/91327 https://www.grb.gov.tw/search/planDetail?id=981064&docId=182710
Appears in Collections:	Research Plans

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