Title: | 高介電氧化層奈米CMOS元件可靠性關鍵問題及界面量測技術研究(I) Key Reliability Issues and Interface Characterization Techniques for High-K Nano-CMOS Devices (I) |
Authors: | 莊紹勳 Chung Steve S 國立交通大學電子工程學系 |
Issue Date: | 2003 |
Gov't Doc #: | NSC92-2215-E009-059 |
URI: | http://hdl.handle.net/11536/91858 https://www.grb.gov.tw/search/planDetail?id=873536&docId=167355 |
Appears in Collections: | Research Plans |
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