微機電光學量測系統晶片設計與製作(I)

Title:	微機電光學量測系統晶片設計與製作(I) Design and Fabrication of MEMS Optical Measurement System on Chip (I)
Authors:	邱一 Chiu Yi 國立交通大學電機與控制工程學系
Issue Date:	2003
Gov't Doc #:	NSC92-2215-E009-050
URI:	http://hdl.handle.net/11536/92164 https://www.grb.gov.tw/search/planDetail?id=873511&docId=167347
Appears in Collections:	Research Plans

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