奈米世代MOSFET關鍵製程技術之研發(I)

Title:	奈米世代MOSFET關鍵製程技術之研發(I) Key Process Technology Research and Development of Nanometer Generation MOSFET (I)
Authors:	葉清發交通大學電子工程系
Issue Date:	2002
Gov't Doc #:	NSC91-2215-E009-050
URI:	http://hdl.handle.net/11536/92768 https://www.grb.gov.tw/search/planDetail?id=784424&docId=150776
Appears in Collections:	Research Plans