| Title: | 電子迴旋共振他學氣相沈積系統之晶片座設計研發與製作 ECR-CVD Wafer Holder Design. Development and Manufacture |
| Authors: | 張國明 CHANG KOW-MING 交通大學電子工程研究所 |
| Issue Date: | 2002 |
| Gov't Doc #: | NSC91-2622-E009-020-CC3 |
| URI: | http://hdl.handle.net/11536/92817 https://www.grb.gov.tw/search/planDetail?id=730562&docId=137829 |
| Appears in Collections: | Research Plans |
- ECR-CVD 系統即時監控與晶圓傳輸之研究 / 李永清;Yung-Ching Li;陳永平;Yon-Ping Chen
- ECR-CVD於改進合成單壁碳奈米管陣列製程之應用 / 黃碩傑;郭正次
- MOCVD行星式反應轉盤之設計與模擬 / 廖宜凡;Liao, I-Fan;成維華;許隆結;Chieng, Wei-Hua
- Growth of the large area horizontally-aligned carbon nanotubes by ECR-CVD / Hsu, CM;Lin, CH;Chang, HL;Kuo, CT
- Electrical properties of SiN/GaN MIS diodes formed by ECR-CVD / Chang, KM;Cheng, CC;Lang, CC
- PASSIVATION OF GAAS POWER FIELD-EFFECT TRANSISTOR USING ELECTRON-CYCLOTRON-RESONANCE CHEMICAL-VAPOR-DEPOSITION SILICON-NITRIDE TECHNIQUE / CHANG, EY;LIN, KC;WU, JW;CHEN, TH;CHEN, JS
- Passivation-Induced Subthreshold Kink Effect of Ultrathin-Oxide Low-Temperature Polycrystalline Silicon Thin Film Transistors / Tsai, Mon-Chin;Liao, Ta-Chuan;Lee, I-Che;Cheng, Huang-Chung
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