Spin-on ZnO thin film transistors with oxidation treatment

Title:	Spin-on ZnO thin film transistors with oxidation treatment
Authors:	Huang, Chen-Shuo Chou, Yi-Teh Liu, Po-Tsun Chung, Wan-Fang Huang, Chien-Jui 光電工程學系 Department of Photonics
Issue Date:	2007
Abstract:	The ZnO TFTs was fabricated by spin-on method and investigated by modulating deposition environments. It was discovered that the conductivity of ZnO TFTs can be obviously changed by modulating curing temperature and the performances can be improved by incorporating oxygen.
URI:	http://hdl.handle.net/11536/9312
ISBN:	978-957-28522-4-8
Journal:	IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007
Begin Page:	557
End Page:	559
Appears in Collections:	Conferences Paper