壓電阻應力計之製程研究

Title:	壓電阻應力計之製程研究 A Study on the Fabrication Processes of Piezoresistive Stress Sensor
Authors:	陸續 LU SU 交通大學電子工程系
Keywords:	壓電阻應力感測器;製程;Piezoresistive stress sensor;Process
Issue Date:	2000
Gov't Doc #:	NSC89-2215-E009-072
URI:	http://hdl.handle.net/11536/93879 https://www.grb.gov.tw/search/planDetail?id=543009&docId=99834
Appears in Collections:	Research Plans