應用DSMC法模擬分析深次微米銅化學氣相沈積之熱流場及沈積度

Title:	應用DSMC法模擬分析深次微米銅化學氣相沈積之熱流場及沈積度 Using DSMC to Simulate Thermal-Flow Field on Deep Naro-meter Trench for Cu-CVD
Authors:	陳俊勳 CHIUN-HSUNCHEN 交通大學機械工程系
Keywords:	直接模擬蒙地卡羅法;銅化學氣相沈積;渠溝;DSMC method;Cu chemical vapor deposition;Trench
Issue Date:	2000
Gov't Doc #:	NSC89-2212-E009-024
URI:	http://hdl.handle.net/11536/93982 https://www.grb.gov.tw/search/planDetail?id=501393&docId=90414
Appears in Collections:	Research Plans

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