| Title: | 極大型積體電路元件相關耐火金屬化物及電介質技術 ULSI Devices Related Refractory Metal and Dielectrics |
| Authors: | 張國明 CHANG KOW-MING 交通大學電子工程研究所 |
| Keywords: | 極大型積體電路;耐火金屬;電介質;化學氣相沈積法;電子迴旋共振化學氣相沈積法;縱橫比;ULSI;Refractory metal;Dielectrics;CVD;ECR-CVD;Aspect ratio |
| Issue Date: | 1999 |
| Gov't Doc #: | NSC88-2215-E009-046 |
| URI: | http://hdl.handle.net/11536/94225 https://www.grb.gov.tw/search/planDetail?id=418084&docId=74163 |
| Appears in Collections: | Research Plans |
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