Title: 氫化物氣相磊晶之側向蔓延磊晶技術之研究
Investigation of the Epitaxial Lateral Overgrowth by Hydride Vapor Phase Epitaxial Growth
Authors: 施敏
SZE SIMON MIN
交通大學電子工程系
Keywords: 氫化物;選擇性成長;三五族化合物;側向蔓延成長;磊晶;Hydride;Selective growth;Ⅲ-V compound;Lateral overgrowth;Epitaxy
Issue Date: 1999
Gov't Doc #: NSC88-2215-E009-038
URI: http://hdl.handle.net/11536/94235
https://www.grb.gov.tw/search/planDetail?id=417924&docId=74127
Appears in Collections:Research Plans


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