隨機記憶體用高介電薄膜電容之研發

Title:	隨機記憶體用高介電薄膜電容之研發 High Dielectric Thin Film Capacitor for DRAM
Authors:	林鵬 LIN PANG 交通大學材料科學與工程研究所
Keywords:	動態隨機存取記憶體;介電常數;薄膜;電容;濺鍍;製程;DRM;Dielectric constant;Thin film;Capacitors;Sputtering;Process
Issue Date:	1998
Gov't Doc #:	NSC87-2215-E009-073
URI:	http://hdl.handle.net/11536/94785 https://www.grb.gov.tw/search/planDetail?id=409130&docId=72441
Appears in Collections:	Research Plans

APA	林., & LIN P. (1998). 隨機記憶體用高介電薄膜電容之研發. https://www.grb.gov.tw/search/planDetail?id=409130&docId=72441.
Bibtex	@article{1998, title={隨機記憶體用高介電薄膜電容之研發}, author={林鵬 and LIN PANG}, journal={https://www.grb.gov.tw/search/planDetail?id=409130&docId=72441}, year={1998}, url={https://ir.lib.nycu.edu.tw/handle/11536/94785}, }