| Title: | 銅化學氣相沉積系統之研製(II) |
| Authors: | 陳茂傑 交通大學電子工程研究所 |
| Keywords: | 化學氣相沈積法;銅;Chemical vapor deposition;Copper |
| Issue Date: | 1998 |
| Gov't Doc #: | NSC87-2622-E009-004 |
| URI: | http://hdl.handle.net/11536/94864 https://www.grb.gov.tw/search/planDetail?id=402094&docId=70740 |
| Appears in Collections: | Research Plans |
