Title: 次微米元件內氧化層缺陷暫態特性量測技術
Oxide Trap Transient Spectroscopy in a MOSFET
Authors: 汪大暉
WANG TAHUI
交通大學電子工程系
Keywords: 氧化層缺陷;暫態特性;空間分布;電場效應;Oxide trap;Transient characteristics;Spatial distribution;Field effect
Issue Date: 1998
Gov't Doc #: NSC87-2215-E009-060
URI: http://hdl.handle.net/11536/95073
https://www.grb.gov.tw/search/planDetail?id=409152&docId=72447
Appears in Collections:Research Plans