電子束微影近距效應校正參數求測

Title:	電子束微影近距效應校正參數求測 Determination of Proximity Correction Parameters for Electron Beam Lithography
Authors:	龍文安 Loong Wen-an 交通大學應用化學系
Keywords:	電子束微影成像;近距效應;校正;參數;Electron beam lithography;Proximity effect;Correction;Parameter
Issue Date:	1998
Gov't Doc #:	NSC87-2215-E009-056
URI:	http://hdl.handle.net/11536/95090 https://www.grb.gov.tw/search/planDetail?id=409020&docId=72412
Appears in Collections:	Research Plans