平面光波導之鉺共摻雜氧化鈦基薄膜材料製程與光電性質研究

Title:	平面光波導之鉺共摻雜氧化鈦基薄膜材料製程與光電性質研究 Photo-Characterization and Processing Development of Er-M Codoped TiO/sub 2/ Film for Optical Planar Waveguide Amplifier
Authors:	陳三元 CHEN SAN-YUAN 國立交通大學材料科學與工程學系
Keywords:	鉺摻雜;薄膜材料製程;平面光波導;光電性質;氧化鈦膜;Er doping;Thin film material process;Planar optimal waveguide;Photoelectronic property;Titanium oxide film
Issue Date:	2001
Gov't Doc #:	NSC90-2216-E009-041
URI:	http://hdl.handle.net/11536/95209 https://www.grb.gov.tw/search/planDetail?id=673296&docId=128274
Appears in Collections:	Research Plans

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