| Title: | 化學氣相沈積氧化鉭在鎢基板上之動態隨機記憶體電容器之研究 |
| Authors: | 羅正忠 交通大學電子工程系 |
| Issue Date: | 1997 |
| Gov't Doc #: | NSC86-2215-E009-042 |
| URI: | http://hdl.handle.net/11536/95338 https://www.grb.gov.tw/search/planDetail?id=320153&docId=57879 |
| Appears in Collections: | Research Plans |
| Title: | 化學氣相沈積氧化鉭在鎢基板上之動態隨機記憶體電容器之研究 |
| Authors: | 羅正忠 交通大學電子工程系 |
| Issue Date: | 1997 |
| Gov't Doc #: | NSC86-2215-E009-042 |
| URI: | http://hdl.handle.net/11536/95338 https://www.grb.gov.tw/search/planDetail?id=320153&docId=57879 |
| Appears in Collections: | Research Plans |