| Title: | 微機電系統校際整合研究---子計畫六：蜂巢形撓性微型機構的設計 Design of a Honeycomb Compliant Micromechanism |
| Authors: | 徐文祥 HSU WENSYANG 國立交通大學機械工程學系 |
| Keywords: | 微致動器;蜂巢型撓性微機構;撓性接頭;靜電力;微機制;半導體製程;多晶矽薄膜;Microactuator;Honeycomb compliant micromechanism;Flexural joint;Electrostatic force;Micromachining;IC process;Polysilicon thin film |
| Issue Date: | 1996 |
| Gov't Doc #: | NSC85-2215-E009-033 |
| URI: | http://hdl.handle.net/11536/95645 https://www.grb.gov.tw/search/planDetail?id=230190&docId=41824 |
| Appears in Collections: | Research Plans |
- 熱動式撓性微型機構的設計與製作(II) / 徐文祥;HSU WENSYANG
- 多自由度電熱式微致動器.的研究 / 吳青臺;Chientai Wu;徐文祥;Wensyang Hsu
- 具串連結構CMOS-MEMS靜電梳狀致動器之實現 / 郭秦輔;邱俊誠
- 鏡面可調式內視鏡的研究---子計畫II：內視鏡用熱動式多自由度微致動器的設計與製作 / 徐文祥;HSU WENSYANG
- An electro-thermally and laterally driven polysilicon microactuator / Pan, CS;Hsu, WY
- 新型抓爬式微致動器製程與特性之研究 / 張家維;Chia-Wei Chang;徐文祥;Wensyang Hsu
- Design and fabrication of a three-dimensional long-stretch micro drive by electroplating / Wu, CT;Tai, WC;Hsu, CP;Hsu, W
Loading...